The IL150 is an eight layer monitor that can interface
to two sensor heads and provides RS232 communication. Resolution
is 0.1nm for most of the materials and the unit is extremely robust
making it ideal for sputter applications. Thickness and rate are
calculated from user supplied data on density and acoustic impedance
of the film material. Data for up to eight materials is stored
in non volatile memory.
Two sensor heads can be attached to the unit and used either as
back-up or, alternatively, as the primary sensor for the particular
film being deposited. The user can also specify a tooling factor
to compensate for differences in detector/substrate geometry.
Deposition may be automatically terminated at
a specified thickness by remote operation of a shutter. A particular
feature of the IL150 is that it is capable
of displaying both positive and negative shifts. This enables the instrument
to be used in certain etching operations and also allows the operator
to observe and therefore compensate for flash-heating effects.
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