Intellevation - Optical Monitoring System

Detectors
	PMT	250 - 800nm
	Silicon	400 - 1100nm
	Si plus InGaAs (Peltier cooled)	500 - 1650nm
	Si plus Ext InGaAs (Peltier cooled)	800 - 2000nm
	PbS (Peltier cooled)	1000 - 2000nm

Standard Products

The products listed below are our standard product line. Other wavelength ranges can be supplied upon request.

IL550 Free Space Optical Monitors

Broadband source and detector modules, which include integrated launch and receive optics, are mounted directly onto the growth chamber. These are controlled and monitored by a 19 inch rack mount controller module. All digitisation, and much of the data analysis is carried out at the detector module before the digital signals are passed to the controller.

Models

	Model	Waveband (nm)
	IL551	350-800
	IL552	400-1100
	IL553	500-1650
	IL554	800-2400

Typical Configurations

Back Face Reflection
on a Test Glass

Front Face Reflection
on a Test Glass

Transmission on a
Test Glass

Direct Monitoring in Transmission

IL560 Fibre Based Optical Monitors

For the fiber based optical monitors the source and detector electronics and much of the optics are contained within a 19 inch rack mount enclosure. Optical fibres carry the optical signal to and from the chamber. At the chamber a number of different launch and receive optics modules are available to cover a wide range of applications and geometries.

Intellevation's fiber based optical monitors are ideal for high speed sampling applications involving direct monitoring of moving substrates. Sample times down to a few milliseconds can be achieved.

Models

Model	Fibres	Waveband (nm)
IL562SF	Single Fibre	400-1100
IL562DF	Dual Fibre	400-1100
IL563SF	Single Fibre	500-1650
IL563DF	Dual Fibre	500-1650

Typical Configurations

Dual fibre system working in transmission mode in a rotating drum sputter coater. System operates in an extremely high speed sampling mode.

Dual fibre system working in transmission mode monitoring a rotating work piece. System operates in an extremely high speed sampling mode.

Single fiber system working in back face reflection mode in an ebeam coater. The launch optics are integrated into Intellevation's 20 position test glass changer.

Our highly experienced Precision Optical Coating Team will be happy to discuss your application and offer advice on the best solution for your needs.

Our skilled engineers will install and commission the above monitor systems directly onto your coating system at your facility as well as provide initial on-site operational training.

In addition, our Precision Optical Coating Team provide a range of specially tailored training and support packages enabling customers to rapidly leverage the full benefits of their Optical Monitoring system. For more information on the training packages available, follow this link: Training And Support

Contact our Technical Team who will be happy to discuss your specific requirements.