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Optical Monitoring For Plasma Etch
& Thin Film Coating

 

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Optical Monitors

Introduction

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Operation

In its standard mode, the system consists of a broad-band source module, a detector module and a rack mounting electronics module.
   
The source and detector modules are mounted directly onto the coating chamber, whilst the electronic control and processing unit is mounted within the coater's control rack. Our engineers will install and commission these units onto your coater at your facility.
   
The electronics module contains the data acquisition systems and communications interface. The Optical Monitor is controlled using proprietory FilmDirector© software running under a user friendly Windows® environment.
   
FilmMaker© provides a powerful modelling feature which enables the signal variation to be predicted in advance of the growth run. This is particularly useful for demanding growth runs where the highest levels of accuracy and control are required.
   
FilmDirector© also contains a range of powerful endpoint detection algorithms enabling a user to tailor an end-point recipe to a specific process across a wide range of applications. The integrated I/O capability enables the Optical Monitor to control the Coating System thereby giving the required automation and accuracy.
           

 


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