PRODUCTS
Optical Monitors
Introduction
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Test
Glass Changers
Increasing
Performance & Manufacturing Yield
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Training
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IL550
Series Benefits
The
IL550 Series of Optical Monitors give thin-film engineers the tools to
decrease process development time & manufacturing costs AND increase
yield & product performance. The system combines advanced optoelectronic
hardware with a suite of powerful software including FilmMaker©,
FilmSimulator©, FilmDirector© and FilmReviewer©
to provide a single complete integrated solution.
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A user friendly Windows® driven interface is fast and intuitive.
The system enables the choice of optimum monitor wavelength &
test glass through inbuilt modeling. |
Fast data acquisition and high noise rejection for accurate termination
is achieved. The probe source is modulated to eliminate the background
light from the chamber and to enhance the signal-to-noise ratio.
Furthermore, the source reference signal is tapped off from the
source module and fed directly into the detector via a fixed fibre
optic cable. This removes effects on the data due to changes in
the spectral output of the light source which occur over time. The
result is a highly stable measurement system even in the most demanding
environments. |
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FilmSimulator©
Software |
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Includes a UNIQUE simulation capability enabling the user to perform
a 'dummy' run using a pre-programmed film structure and incorporate
the actual hardware filters, software filters, sampling rate, termination
algorithm and include a programmable noise level to simulate
a ‘real run’.
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The
following features can be programmed into the simulator to reflect
real-life E-beam systems:
Independant noise levels for each material.
Programmable random deviation in refractive index.
A random variation in photometric gain at each test glass change.
An essential process design tool reflecting the response on your
actual system!
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FilmReviewer©
Software |
FilmReviewer© is used to view, analyse and reprocess
previous runs.
Take REAL raw data from your coating system, and observe the effects
of reprocessing it, changing the filtering parameters, the sampling
rate, the latency and hold-off parameters and the termination algorithms.
Another powerful tool enabling process engineers to optimise their
process in the fastest, cheapest and most efficient manner!
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Integration to coating tools for automated operation |
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Remote control for through-wall cleanroom implementation. Log the
data for subsequent analysis or offline SPC |
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© Intellevation
Ltd 2006 |