The NEW LEP400
Plasma Etch Depth Monitor
 
Product
Selection
The
LEP400 Series comes in a number of different configurations to satisfy
the etching needs of a wide range of diverse materials as well as the
diverse needs of a wide range of applications - from flexible research
and development labs to the stringent requirements of high volume production
facilities. We have made the range as modular as possible to enable
you to choose the system that meets your specific requirements. In
this format we can supply a complete solution that you can
have up and running in minutes. You simply need to supply the etch machine
and a table or trolley to put the controller and screen on.
Base Systems
The Base Systems are the starting point for your
selection. Each Base System includes the following items;
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 A
LEP400 interferometric head with co-linear camera for live
viewing of the sample.
A
kinematic mount with fingertip control for rapid normal incidence
alignment of the optical train.
A
high precision 25mm travel manual XY stage to align the laser
spot with the desired mask feature.
An
adapter block to enable you to bolt the head to the top
of the etch chamber.
All
power supplies and cabling.
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A
20 bit A/D acquisition module for high resolution interference
signal capture.
A
Dell Server based controller module.
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Preinstalled
EtchDirector software. See more details of the EtchDirector
software here. |
The Base Systems come in three flavours depending
upon the desired monitoring wavelength, namely;
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MONITORING
WAVELENGTH |
ORDER
CODE |
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670nm |
LEP400.BASE.670 |
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980nm |
LEP400.BASE.980 |
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1550nm |
LEP400.BASE.1550 |
Standard
Options
Each Base System can be supplied with the following
options to suite your requirements;
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Upgrade to full digital IO capability. The
EtchDirector software enables digital IO signals to be associated
with critical events, so that the Base System can be integrated
into an etch machine's control system allowing automatic start
and stop of the etch when the required etch depth or end point
condition has been met.
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LEP.DIGIIO |
14 inch B&W monitor for
viewing the live image of the sample and the laser spot from
the LEP400 camera. The monitor can be placed next to the
Base System, or it may be placed close to the LEP400 head.....ideal
for operation in remote cleanroom environments.
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LEP.BWMON |
On screen graphics capture.
This enables a live view of the camera image to be viewed on
the 20 inch LCD
monitor (LEP.LCDMON). This is ideal in situations where space
is critical.
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LEP.VISION |
Stylish 20 inch LCD Monitor to connect to
the Base System.
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LEP.LCDMON |
Matching keyboard and mouse to connect to the
Base System.
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LEP.KBDMOU |
Alternative Configurations
A range of
other options are available for interfacing and integration
into OEM plasma etch tools. Please contact our Technical
Team to discuss your application.
 Contact
us today for a quote...
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