PRODUCTS
Crystal Monitors
IL820 Quartz Crystal Growth Rate Controller
Flexibility in Process Programming
| The IL820 quartz crystal process controller is different. As a next generation controller it meets the needs of sophisticated designs developed to optimize the performance of single and multi-layer thin film structures. The process profile is totally flexible, both hardware and software handshakes allow communication between instruments at a high level, the control performance and resolution of the instrument set new standards and of course the display format includes real time graphics. |
 |
Within the IL820 this synchronization is achieved through commands embedded at any point in the process. These commands can be either in hardware (through the input/output plug-in board) or in software (through the RS232 or IEEE options).
The fundamental action of the IL820 controller is to run a PROCESS. A PROCESS consists of up to 30 steps, each of which can consist of an individual action programmed using a two letter mnemonic.
The IL820 is a fully featured rate controller meeting the most demanding of today's thin film deposition needs. The instrument has been tested against instruments five times its price and outperforms all of them on rate control - and we can prove it.. The unit features a comprehensive sequencing suite allowing multi-layer deposition with full support for loop operations. The IL820 is different from any other thin film deposition controller in that the process profile is totally flexible. Both hardware and software handshakes are supported and allow communication between instruments at a high level.
The resolution of the instrument sets new standards (better than 0.001nm/s for Copper). The unit is programmed using any combination of two letter mnemonics such as 'PR' for power ramp or 'WT' for wait and 9 Materials and 9 Processes can then be repeated in any order within a 99 position sequence. Loops both within the sequence and within the process itself are fully supported. In spite of the units' clever features the core function is that of a quartz crystal controller and it is the quality of this key capability that has made the unit indispensable at demanding installations around the world. One example are High Tc superconducting films where the IL820 has achieved rate control for Yttrium at 0.02 nm/s with a precision of 0.002 nm/s. Long term drift in control was less than 1%.
Please contact our Sales team for a quotation.
Detailed Specification
| Display: |
High
contrast supertwist backlit LCD |
|
| Process: |
Fully
flexible process of 30 steps. 9 processes stored locally. |
|
| Materials:
|
Data
for 9 materials is stored locally in the IL820. |
|
| Sequence:
|
The
IL820 operates a 99 position sequence with support for repetitive
structures within that sequence using DO LOOP commands. |
|
| Special
Functions: |
Time: |
elapsed
process time and step time. |
Crystal
Fail: |
switch
to backup or complete on time/power |
|
Maximum
Power: |
stop
or continue |
|
Rate
Fail: |
stop
or continue |
|
Test: |
simulates
complete deposition including I/O |
|
Alarm: |
fully
programmable for any event that can be associated with outputs at
executive level |
|
| Control Inputs & Outputs: | Sensor
inputs: |
primary and backup or multiple sensor head. |
Source
control: |
voltage selectable 0 to (+-) 5V, 0 to (+-)10V. Single source control for IL820. | |
Shutter
Outputs: |
2 shutters and crystal changeover switch. | |
Remote
Input: |
increment/decrement source power, stop/start process. | |
Source
control loop parameters: |
2 sets per material including impulse response data and minimum/maximum permitted power. | |
| Resolution: | Determined by tooling factor, density and sampling frequency. For Copper at unity tooling factor a rate resolution of 0.001nm/s can be obtained with the IL820. | |
| Input/Output Option: | 8
relay outputs 1 analogue output 8 opto-isolated inputs 1 analogue input |
|
| RS323 Option: | 2 modes - process or black box software or hardware handshake. 44 English language commands. | |
IEEE
Option: |
2
modes - process or black box. 44 English language commands. |
|
Power
Requirements: |
90/250
V, 50 or 60 Hz, 50VA |
|
Operating
Temperature: |
0-40'C
|
|
Size:
|
308
x 220 x 90mm |
|
Weight: |
2.8kg
|
|
Sampling
Rate: |
Adjustable
between 0.5Hz and 5Hz |
|