intellevation
intellemetrics
Optical Monitoring For Plasma Etch
& Thin Film Coating

 

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Company Overview
Intellemetrics / Intellevation History

Intellevation brings together a team with many years experience in the design, build, testing and implimentation of optical and crystal process monitoring and instrumentation equipment for the thin film coating and dry etching industries.

Many of the team have strong track records as thin film growth and dry etch end users in both R&D and volume manufacturing environments. This blend of focussed expertise and in-depth process knowledge enables Intellevation to design and supply robust, high-performance products that target REAL customer needs and then to supply the necessary detailed customer support in the field.

In addition, Intellevation has acquired the design rights and Intellectual Property of the intellemetrics™ range of products, bringing 23 years of proven market experience supplying thin film process monitoring solutions.

Intellevation utilises a Scottish-based manufacturing partner for volume production bringing to bear ISO9001 quality systems and PCI-610 Class 3 production process capability.

Intellevation’s Design & Development facility is based in Scotland, UK in Hillington’s Industrial Park close to Glasgow Airport and a network of major motorways.

Intellemetrics / Intellevation History

1983

Intellemetrics Ltd formed as a spin out from Glasgow University, Scotland. First crystal monitor (IL001) products launched.

1984

IL100 crystal monitor launched.

1985

First IL400 multifilm, multi source, fixed process crystal controllers launched.

1985

Edwards FTM5 crystal monitor launched. Unit designed and manufactured by Intellemetrics.

1986

First Optical Termination unit (IL500) for precision optical coating launched.

1987

First complete White Light Optical Monitor (IL510) system launched.
1988 IL800 fully programmable crystal controller, with multi-board options launched.

1988

First PLC System (IL900) launched.

1989

Full Intellemetrics crystal sensor head range launched including first-in-world linear actuated shutter head.
1989 IL700 alloying crystal multi-controller launched.

1990

IL820 fully programmable crystal controller with multi-board options launched offering more processes, procedures, materials and memory than the IL800.

1991

BOC Group buy a 33% stake in Intellemetrics.

1992

IL150 crystal monitor launched.

1993

White light, UV and IR optical fibre-based versions of IL510 optical monitors launched.

1994

Laser-based optical monitor launched.

1995

First 670nm LEP300 Laser End Point Detector for plasma etching launched.

1996

Edwards FTM6 and FTM7 crystal monitors designed and manufactured by Intellemetrics launched.

1997

Near IR laser end point detector launched.

1998

Modulated laser end point detector launched.

1999

First laser based DWDM optical monitor launched.

2000

IL541 broadband white light optical monitor launched.
2001 In 2000 & 2001 more than 50 DWDM optical monitors sold, satisfying the vast majority of the available market at the time.

2001

The BOC Group buy 100% stake in Intellemetrics.

2003

IL550 range of optical monitors launched.

2004

Intellevation Ltd formed. All relevant IP, products, trade marks acquired from BOC Group. Company is now wholly owned by founders.

2005

Intellevation moves to new custom built lab and office premises in Glasgow. Government awards received to develop novel crystal monitoring solutions.
2006

IL560 range of high speed fibre-based optical monitors launched for use in direct monitoring of fast moving substrates in sputter coating and ion beam deposition applications.

LEP400 launched. Based on Intellevation's leading LEP300 technology, with improved performance and feature set, ideal for OEM integration and for retrofit in R&D labs as well as volume production facilities.

2007

See press releases!

Copyright © Intellevation Ltd 2006